Development and production of special photolithography, inspection and measurement equipment: Photolithography, inspection and measurement equipment for the microelectronic industry: For mask fabrication (masks for ICs, printed circuit boards, LCDs, TV shadow masks) : single-channel, multi-channel and large-area laser pattern generators; photo repeaters; laser mask repair systems. For photolithography: steppers (wafer steppers, LCD steppers and PCB steppers) ; mask aligners (contact / proximity exposure, top-to-bottom side alignment) ; Inspection and measurement equipment: flatness inspection systems for wafers, masks, LCDs; defect inspection systems for wafers, masks, LCD masks; critical dimensions inspection systems for wafers, masks; coordinate measurement systems; Laser Pattern Generators since 1983Multi-Beam Laser Pattern Generator EM-5089 since 1984